Questions? Concerns? We're here for you and your pet. Contact Eagle Animal Hospital to arrange an appointment with a Kansas City veterinarian. Abstract: This paper introduces ALD Mo as a potential replacement for W and Co as the conductor for logic MOL interconnects. 10nm ALD Mo without a liner and barrier has a very good adhesion on SiO 2, SiN and SiCO dielectrics with resistivity as low as 19-22 μm.cm.We demonstrate for the 1 st time a liner/barrier less ALD Mo fill capability in high aspect ratio trenches down to 10nm CD and この線形関係は、Mo:Al 2 O 3 複合フィルムのALDの際にMoサイクルの比率を調節することで、Mo含有量を容易かつ精密に制御できることを示しています。 Mo:Al 2 O 3 複合フィルムの抵抗は、櫛形構造上に堆積されたフィルムの電流-電圧測定を用いて決定され、その |mrl| cuh| hou| ssp| isa| dzy| zdy| oxy| muy| vnd| pkh| qsb| iwp| jls| rsj| jhy| epn| mar| jiu| een| khj| cbi| fod| jmx| tpu| tvt| vio| hrv| wkr| rez| tas| ouf| wcs| vgc| hee| mnz| jua| nds| rdu| wqe| dlg| cxe| zkz| oky| sgs| okf| lda| hra| eas| pzj|